PUBLICATION
Advanced Display and Nano Convergence Laboratory
Journal
Journal
2016 Pattern distortion analysis of surface plasmon interference lithography using line grating structure on photoresist
본문
- Author
- Yong Min Kim, and Kyung Cheol Choi*
- Journal
- IEEE transaction on nanotechnology
- Volume/Issue
- 15, 2
- Year
- 2016
- Status
- 220-224, March, Published
- Link
- https://doi.org/10.1109/TNANO.2016.2514407 423회 연결